assembly apparatus of electrostatic vertical micro actuator using MEMS actuator, electrostatic vertical micro actuator having the same and manufacturing method thereof

摘要

The invention of the vertical micro-actuator assembly device using a MEMS actuator, it provided a vertical micro-actuator and relates to a method of manufacturing the same, MEMS (Micro Electro Mechanical Systems) driver 210; The torsion bar of the micro-actuator (torsion bar) (140) connected to be biased in the vertical direction on one side of the torsion bar connected to the beam 240; And the actuator connection 221 formed coupled to the MEMS actuator 210, the drive coupling 221 and a beam connecting portion is fastened (222) and the assembly formed by the torsion bar is connected to a connection beam 240 and a , the drive of the connecting portion is determined by the operation of the MEMS actuator 210, 221 and the beam connection part 222 connected to the torsion bar beam 240 naemyeo pull or push the torsion bar 140 in accordance with the relative position between the the assembly connection device 220 that is adjusted angle; and to the technical aspect is configured including, through a micro-machining process after the fabrication of devices manufactured by a simple assembly, to be complete, the complex and cumbersome chemical and thermal treatment process without the additional, more simple assembly of vertical-type micro-actuator using a MEMS actuator that can be expected to be produced by high production yield, it relates to a micro-actuator and a method of manufacturing the vertical type having.