首页> 美国政府科技报告 >Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal, and Residual Stress
【24h】

Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal, and Residual Stress

机译:电离辐射对微机电系统(mEms)执行器的影响:静电,电热和残余应力

获取原文

摘要

The effects of ionizing radiation on the operation of polysilicon mmicroelectromechanical system (MEMS) electrostatic actuators, electrothermal actuators, and residual stress cantilevers were examined. Pre-irradiation, in- situ, and post-irradiation measurements were taken for the electrosatic and electrothermal actuators. The residual stress cantilevers were characterized before and after irradiation. All devices were irradiated to a total ionizing does of 1 megarad(Si) using both the Air Force Research Laboratory's low energy X-ray source and Co-60 gamma source.

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号