ELECTROSTATIC ACTUATOR, METHOD OF MANUFACTURING THE ELECTROSTATIC ACTUATOR, ELECTROSTATIC MICRO PUMP WITH THE ELECTROSTATIC ACTUATOR, INK JET RECORDING HEAD WITH THE ELECTROSTATIC ACTUATOR AND INK JET RECORDER WITH THE INK JET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator, a method of manufacturing the same, an electrostatic micro pump with the same, an ink jet recording head with the same and an ink jet recorder with the ink jet recording head, whereby operation failures of buckling and deflecting a diaphragm having a corrosion resistant thin film formed are prevented, corrosion resistances to liquids and ink are made superior, the yield is improved, costs and power consumption are made low with resources saved, and irregularities in jetting liquids and ink liquid are reduced, so that high-quality ink images are recorded.;SOLUTION: There are provided the diaphragm 1 which oscillates by an electrostatic force, an electrode substrate 2 opposite to the diaphragm 1, an electrode 3 formed on the electrode substrate 2 to be opposite via a gap to the diaphragm 1, the corrosion resistant thin film 4 having a corrosion resistant thin film formed on the diaphragm 1 opposite to the electrode 3, and a preventing means 5 for preventing the diaphragm 1 of the corrosion resistant thin film 4 from deflecting.;COPYRIGHT: (C)2002,JPO