ELECTROSTATIC ACTUATOR, MANUFACTURING METHOD OF THE ELECTROSTATIC ACTUATOR, INK-JET RECORDING HEAD HAVING THE ELECTROSTATIC ACTUATOR AND INK JET HAVING THE INK-JET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator which prevents incidence of fine chips and crazing, when cutting without requiring cutting of wafer by dicing and the like allows few foreign particles to enter into a gap between a vibrating plate and an electrode facing to it, even after opening a bonding pad area, has a high yield, and has satisfactory productivity to make it low cost, and to provide a manufacturing method of the electrostatic actuator, an ink-jet recording head, having the actuator and an ink jet recording device having the ink-jet recording head.;SOLUTION: The electrostatic actuator is constituted of a vibrating plate, which operates with vibration by an electrostatic force, a vibrating plate substrate 2 which forms the vibrating plate 1, an electrode 3 which is arranged opposite to the vibrating plate 1 formed on the vibration plate substrate 2 via an air gap, an electrode substrate 4 on which the electrode 3 is formed, and a corner removed part 5 which is made by removing the corner which the rear face 4a and the side face 4b of the electrode substrate 4 cross.;COPYRIGHT: (C)2002,JPO