Angle effect of ultrasonic agitation on the development of thick JSR THB-430n negative UV photoresist

摘要

A novel method by using adjusted ultrasonic agitation to improve the developing depth, developing time, surface roughness, and undercut problem of thick JSR-430N negative UV photoresist is proposed. This method has been successfully employed to fabricate ultra- thick microstructures of thickness more than 1.4 mm and aspect ratio at least of 5 by JSR THB-430N negative UV photoresist. With the improved ultrasonic developing procedure, the resist can potentially be a replacement of SU-8 resist for the application of high aspect ratio plating mold, due to its good stripping property [1]. The power and angle of ultrasonic agitation have also been studied and characterized. The development of thick JSR-430N resist under different ultrasonic agitation angles has been verified to have different effects on developing time, resist sidewall profile, and surface roughness.