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Negative photoresist compositions for the formation of thick films, photoresist films and methods of forming bumps using the same

机译:用于形成厚膜的负性光致抗蚀剂组合物,光致抗蚀剂膜以及使用其的凸点形成方法

摘要

A negative photoresist composition is used for the formation of thick films and includes (A) a novolak resin, (B) a plasticizer, (C) a crosslinking agent and (D) an acid generator. The composition is applied onto a substrate and thereby yields a photoresist film 5 to 100 μm thick. Likewise, the composition is applied onto a substrate of an electronic part, is patterned, is plated and thereby yields a bump.
机译:负性光致抗蚀剂组合物用于形成厚膜,并且包含(A)线型酚醛清漆树脂,(B)增塑剂,(C)交联剂和(D)产酸剂。将该组合物施加到基板上,从而产生5至100μm厚的光致抗蚀剂膜。同样地,将组合物施加到电子部件的基板上,进行图案化,电镀,从而产生凸点。

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