Influence of Mn doping on structural, optical and electrical properties of CdO thin films prepared by cost effective spray pyrolysis method

摘要

Transparent and conducting cadmium oxide (CdO) and manganese doped CdO (Mn: CdO) thin films were deposited using a low cost spray pyrolysis method on the glass substrate at 300℃. For Mn doping, various concentrations of manganese acetate (1-3 wt%) was used in the spraying precursor solution. The structural, electrical and optical properties of CdO and Mn: CdO films were investigated using X-ray diffraction (XRD), scanning electron microscope (SEM), atomic force microscope (AFM), UV-vis and Hall measurement. X-ray diffraction study reveals that the CdO and Mn: CdO films are possessing cubic crystal structures. SEM and AFM studies reveal that the grain size and roughness of the films are increased with increasing Mn doping concentration. Optical transmittance spectra of the CdO film decreases with increasing doping concentration of manganese. The optical band gap of the films decreases from 2.42 eV to 2.08 eV with increasing concentration of manganese. A minimum resistivity of 1.11 × 10~(-3) Ω cm and maximum mobility of 20.77 cm~2V~(-1) s~(-1) is achieved for 1 wt% of manganese doping.