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Porous GaP Multilayers Formed by Electrochemical Etching

机译:电化学腐蚀形成多孔GaP多层

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摘要

The properties of porous GaP, formed by anodic etching in H_2SO_4, are described. Pore size, pore density, and the interpore distance depend on the dopant density and the potential at which the sample is etched. In addition, it is shown that at high potential, the GaP passivates as a result of the formation of an oxide layer. These features allow us to grow multilayer structures of GaP with modulated porosity and/or oxide layers. The dissolution of oxide at the base of a porous layer can be used to produce freestanding porous membranes.
机译:描述了在H_2SO_4中通过阳极蚀刻形成的多孔GaP的特性。孔尺寸,孔密度和孔间距取决于掺杂剂密度和样品被蚀刻的电位。另外,显示出在高电势下,GaP由于形成氧化物层而钝化。这些特征使我们能够生长具有调节的孔隙率和/或氧化物层的GaP多层结构。氧化物在多孔层底部的溶解可用于生产独立式多孔膜。

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