A ZnTaOx Based Resistive Switching Random Access Memory

摘要

The improved resistive switching performance of TaO_x by introducing ZnO was reported in this paper. By co-sputtering, the ZnTaO_x device shows better endurance, lower operating voltage and more uniform resistance distribution. The improvement is mainly due to the more abundant intrinsic defects such as oxygen vacancies which facilitates the formation of conductive filaments in the oxide compound.