Patterned sapphire substrate (PSS) was fabricated by wet etching solutions with different mixture ratios of H_2SO_4 to H_3PO_4 and different temperatures to investigate the fabrication mechanisms. It was found that the mixture ratio and temperature of the etching solutions affect the ratio of the pattern diameter to the pattern depth. In addition, the observed pattern shape was strongly affected by the mixture ratio. To discuss the reaction mechanisms of sapphire with H_2SO_4 and H_3PO_4 separately, we estimated the activation energies and reaction frequency factors for each reaction. By the estimated results, the behavior of the observed pattern shape for the etching conditions was well explained. To confirm the fabrication mechanism of pattern shape in the microscopic scale, the electron probe microanalysis (EPMA) inspection of the sapphire surface after H_2SO_4 and H_3PO_4 etching were carried out. As a result, it was indicated that the pattern shape is controlled by the step flow reaction with and without impurities in the etching solutions. From the observation of the pattern shape, the estimation of the activation energies and reaction frequency factors, and EPMA inspection of the reaction products for each reaction, a schematic model of the fabrication mechanisms for the wet etching of a PSS was established.
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