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Formation, deposition and examination of size selected metal clusters on semiconductor surfaces: An experimental setup

机译:在半导体表面上形成,沉积和检查尺寸选定的金属簇的实验装置

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An instrument designed to investigate the chemical behavior of size selected metal clusters on semiconductor surfaces is described. The clusters are formed using laser vaporization, mass selected in a magnetic mass analyzer and deposited on TiO2 substrates under UHV conditions with impact energies ranging from <= 1 to >100 eV/atom. Intensities of mass selected Au-n(+) and Ag-n(+) clusters range from 0.03 to 3 nA. Intensity, beam focusing and deposition energy are discussed. Once deposited on the surface, the clusters are investigated using scanning tunneling microscopy (STM) and/or temperature programmed desorption (TPD). Examples are presented showing STM images of Au-5 deposited on a clean rutile titania surface and of the TPD of propene from TiO2. (C) 2006 Elsevier B.V. All rights reserved.
机译:描述了一种旨在调查尺寸选定的金属簇在半导体表面上化学行为的仪器。使用激光汽化形成团簇,在磁质量分析仪中选择质量,然后在冲击能量范围从<= 1到> 100 eV / atom的UHV条件下将其沉积在TiO2基板上。选择的Au-n(+)和Ag-n(+)团簇的质量强度范围为0.03至3 nA。讨论了强度,束聚焦和沉积能。一旦沉积在表面上,就使用扫描隧道显微镜(STM)和/或程序升温脱附(TPD)对簇进行研究。给出的实例显示了沉积在干净的金红石二氧化钛表面上的Au-5的STM图像以及来自TiO2的丙烯的TPD的STM图像。 (C)2006 Elsevier B.V.保留所有权利。

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