A near-field microwave microscope for determining anisotropic properties of dielectric materials

摘要

A near-field microwave microscope based on the "inductive diaphragm-capacitive diaphragm" resonance system for contactless local determination of anisotropic properties of dielectric materials is presented. It is shown that the dielectric properties of microwave ceramic materials used as substrates for microwave circuits can be measured in directions parallel and normal to the working surface.