Near-field scanning microwave microscope, has dielectric resonator comprising dielectric with high dielectric constant sealed with resonator, and tuning fork provided on surface of which hybrid-tip probe is attached

摘要

The microscope has a dielectric resonator (50) propagating a wave from a wave source (20), and comprising a dielectric. The dielectric is sealed with the resonator, and provides high dielectric constant. The resonator provides TE, TM and TEM modes. A hybrid-tip probe (60) scans the wave output from the dielectric resonator on a sample (80). A tuning fork is provided on a surface of which the probe is attached.