Microstructure and Ferroelectric Properties of BaZr_(0.2)Ti_(0.8)O_3 Films Prepared by Sol-Gel

摘要

BaZr_(0.2)Ti_(0.8)O_3 films were prepared using inorganic zirconate and the crystalline microstructure, surface morphology and ferroelectric properties of BZT films were investigated. It is found that the crystal structure of the films belongs to tetragonal phase and is close to cubic phase. The obvious polarization versus electric voltage (P-V) hysteresis loop and butterfly-shaped e-V curves were observed in BaZr_(0.2)Ti_(0.8)O_3 films. The remanent polarization (2P_r) and the coercive field (2E_C) of BaZr _(0.2)Ti_(0.8)O_3 films obtained from the hysteresis loop are 0.1669 mu C/cm~2 and 21.53 kV/cm, respectively. The dielectric constant and tunability of the BaZr _(0.2)Ti_(0.8)O_3 films are 113 and 10.2%, respectively.