The TEM sample preparation method for quick turn around time on TEM evaluation

摘要

The TEM evaluation in a short time has been becoming more important for the effective development of the semiconductor device which it proceeds to become minute through and to realize the early stable mass production. To be shortened the sample preparation time when it is the first delay factor on TEM evaluation, two sample preparation methods which develop a sample preparation meth6d with FIB into more are proposed recently. An examination result of the advantage, disadvantage of both techniques is mentioned by this thesis.