聚焦离子束技术制备超薄TEM样品-X2样品台的应用

摘要

聚焦离子束技术在制备TEM样品方面得到了广泛的应用。普通传统的制样减薄方法存在远端薄区极易弯曲和薄区厚度不均匀的问题。针对存在的这些问题本文使用Zeiss公司的X2样品台采取交叉减薄的方法制备一个具有均匀的极薄的TEM样品。本文主要介绍X2样品台的工作原理和交叉减薄的实验过程，并分析了该方法在制备TEM样品时存在的优缺点以及其独特的适用性。%Focused ion beam ( FIB) technology is widely used in the preparation of the sample for transmission electron microscopy ( TEM) . Bending of the distal thin area and nonuniform thickness of the thin area are common problems for traditional TEM-sample preparation method. In order to solve these problems, we prepared a stable extremely thin and uniform TEM-sample via crossly thinning of the sample by using a X2-sample stage. The X2-sample stage was a patent of Zeiss company. This paper mainly introduced the operating principle and the process of experiments. The advantages and disadvantages in the preparation and the application were also discussed.