APPARATUS AND METHOD FOR COATING SAMPLE PROTECTION LAYER TO SHORTEN INTERVAL OF TIME FOR FABRICATING SAMPLE FOR TEM ANALYSIS AND FORM SAMPLE FOR TEM ANALYSIS WITHOUT DAMAGING SAMPLE

摘要

Purpose: a sample protection layer is arranged to shorten a period; it is used to manufacture for product as TEM (transmission electron microscope) analysis and be formed the apparatus for coating of the sample for transmission electron microscope analysis; sample will not be damaged, by the protective layer for being readily formed the epoxy for transmission electron microscope analysis with lower cost. Construction: a sample (S) includes being analyzed in the stage (100) for capableing of rotating support of analysis direction. Epoxy resin compound is supplied to the a-power supply part (120) of analysis site sample. One control unit (140) controls the revolving speed in stage to control the thickness of the epoxy resin compound for rotating the surface applied to sample by the stage.