Mechanically detected terahertz electron spin resonance using SOI-based thin piezoresistive microcantilevers

Eiji Ohmichi; Toshihiro Miki; Hidekazu Horie; Tsubasa Okamoto; Hideyuki Takahashi; Yoshinori Higashi; Shoichi Itoh; Hitoshi Ohta

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Mechanically detected terahertz electron spin resonance using SOI-based thin piezoresistive microcantilevers

机译：使用基于SOI的薄压阻微电孔机械检测到的Terahertz电子自旋共振

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?Novel fabrication process of piezoresistive cantilevers based on SOI wafers and spin-on diffusion.

?Thin customized piezoresistive cantilevers with a built-in compensation circuit.

?Piezoresistive detection of multi-frequency ESR spectroscopy for 80–160?GHz.

Abstract

We developed piezoresistive microcantilevers for mechanically detected electron spin resonance (ESR) in the millimeter-wave region. In this article, fabrication process and device characterization of our self-sensing microcantilevers are presented. High-frequency ESR measurements of a microcrystal of paramagnetic sample is also demonstrated at multiple frequencies up to 160?GHz at liquid helium temperature.

机译：<！[cdata [

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< CE：简单段ID =“SP010”View =“全部”>

？基于SOI晶片和旋转扩散的压阻性悬臂的新型制造过程。

？薄自定义压阻悬臂W一个内置补偿电路。

？压阻性检测多频ESR光谱的80-160？GHz。

抽象

我们开发了用于机械检测的电子自旋共振的压阻式微电子（ESR）在毫米波区域中。在本文中，提出了我们的自我传感微静电器的制造工艺和设备表征。在液氦温度下，还在多达160℃的多个频率下进行微晶的微晶的高频ESR测量。

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来源
《Journal of magnetic resonance》 |2018年第2018期|共6页
作者
Eiji Ohmichi; Toshihiro Miki; Hidekazu Horie; Tsubasa Okamoto; Hideyuki Takahashi; Yoshinori Higashi; Shoichi Itoh; Hitoshi Ohta;
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作者单位

Graduate School of Science Kobe University;

Graduate School of Science Kobe University;

Graduate School of Science Kobe University;

Graduate School of Science Kobe University;

Organization for Advanced and Integrated Research Kobe University;

Graduate School of Science Kyoto University;

Graduate School of Science Kyoto University;

Molecular Photoscience Research Center Kobe University;

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原文格式 PDF
正文语种 eng
中图分类 O82.532;
关键词
Piezoresistive effect; Electron spin resonance; Microcantilever; Silicon-on-insulator (SOI) wafer; Terahertz (THz);

机译：压阻效应;电子自旋共振;微电子;绝缘体硅 - 硅片（SOI）晶圆;太赫兹（THZ）;

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1. Mechanically detected terahertz electron spin resonance using SOI-based thin piezoresistive microcantilevers [J] . Eiji Ohmichi, Toshihiro Miki, Hidekazu Horie, Journal of magnetic resonance . 2018,第期

机译：使用基于SOI的薄压阻微电孔机械检测到的Terahertz电子自旋共振
2. In-Situ Measurement of Fluid Density Rapidly Using a Vibrating Piezoresistive Microcantilever Sensor Without Resonance Occurring [J] . Zhao L., Xu L., Zhang G., IEEE sensors journal . 2014,第3期

机译：使用振动压阻式微悬臂梁传感器快速进行流体密度的原位测量
3. Recent Advances in High-Frequency Electron Spin Resonance Detection Using a Microcantilever [J] . Ohta H, Ohmichi E Applied Magnetic Resonance . 2010,第1a4期

机译：微悬臂梁在高频电子自旋共振检测中的最新进展
4. Characterization of a Piezoresistive Microcantilever as a Sensor for Detecting the Bio-molecules [C] . Kyung-Ah Yoo, Kwang-Ho Na, Seung -Ryong Joung, International Symposium on Eco-Materials Processing Design . 2006

机译：作为检测生物分子的传感器的压阻微电子的表征
5. Investigation of electron-nuclear spin interactions in two-dimensional electron systems via magnetoresistively detected magnetic resonance. [D] . Caldwell, Joshua D. 2004

机译：通过磁阻检测磁共振研究二维电子系统中的电子-核自旋相互作用。
6. Structure of Self-Aggregated Alamethicin in ePC Membranes Detected by Pulsed Electron-Electron Double Resonance and Electron Spin Echo Envelope Modulation Spectroscopies [O] . Alexander D. Milov, Rimma I. Samoilova, Yuri D. Tsvetkov, 2009

机译：脉冲电子-电子双共振和电子自旋回波包络调制光谱法检测ePC膜中自聚集的Alamethicin的结构
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Mechanically detected terahertz electron spin resonance using SOI-based thin piezoresistive microcantilevers

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