基于SOI压阻式噪声传感器的声学动态特性分析与设计

摘要

Aiming at the problem of dynamic measurement of silicon on insulator(SOI)piezoresistive noise sensor,acoustics structure is designed by acoustics features analysis foundation,to ensure frequency response character of noise sensor.A kind of SOI acoustics sensitive membrane chip and an acoustics sensitive structure fomed by acoustics cavity and the chip are designed,so that the purpose of adjusting acoustics cavity frequency character can be achieved by adjusting structure parameters.Test result shows that the noise sensor has excellent dynamic detection performance.%针对绝缘体上硅(SOI)压阻式噪声传感器的动态测量问题,利用声学特性分析基础进行声学结构设计,以保证噪声传感器的频响特性.设计了一种SOI感声膜芯片及与声腔结构构成的声敏感结构,通过调整结构参数可达到调整声腔的频率特性的目的.测试结果表明:噪声传感器具有良好的动态检测特性.