Scanning X-ray microscopy with large solid angle X-ray fluorescence detection at the XUV beamline P04, DESY

摘要

The presented scanning transmission X-ray microscope (STXM), built on top of a modular platform, combines soft X-ray transmission and fluorescence microscopy with high detection efficiency and high spatial resolution. The setups user concept as well as the large solid angle (> 1 sr) of the integrated Silicon-drift-detector are unique characteristics of this endstation. In combination with the soft X-ray beamline P04 at PETRA III (DESY), it delivers a new type of nanoscope, providing a high flexibility and very low acquisition times.