机译:固定磨石金刚石锯加工应用于SiC单晶晶晶片加工的分析力建模
Xian Univ Technol Sch Mech &
Instrument Engn 5 South Jinhua Rd Xian 710048 Shaanxi Peoples R China;
Xian Univ Technol Sch Mech &
Instrument Engn 5 South Jinhua Rd Xian 710048 Shaanxi Peoples R China;
Xian Univ Technol Sch Mech &
Instrument Engn 5 South Jinhua Rd Xian 710048 Shaanxi Peoples R China;
Xian Univ Technol Sch Mech &
Instrument Engn 5 South Jinhua Rd Xian 710048 Shaanxi Peoples R China;
Xian Univ Technol Sch Mech &
Instrument Engn 5 South Jinhua Rd Xian 710048 Shaanxi Peoples R China;
Missouri Univ Sci &
Technol Dept Mech &
Aerosp Engn Rolla MO 65409 USA;
wire saw machining; cutting force modeling; SiC monocrystal wafers;
机译:固定磨石金刚石锯加工应用于SiC单晶晶晶片加工的分析力建模
机译:超声振动线锯加工SiC单晶晶片的表面粗糙度优化
机译:SiC单晶晶圆加工的力建模与控制
机译:单晶硅晶片的固定式磨料金刚石线锯切片
机译:碳化硅晶须增强氮化硅陶瓷基复合材料的金刚石磨料加工
机译:紫外线-树脂结合剂金刚石磨具精密加工硬脆材料的实验研究
机译:开发新型锯线固定金刚石磨粒,焊料和Ni电镀及其在切割硅和蓝宝石锭的切割中的应用