首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Application of compact Non-Evaporable Getter and Sputter combination in UHV system of HIAF
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Application of compact Non-Evaporable Getter and Sputter combination in UHV system of HIAF

机译:Compance Num-System在HIAF系统中的应用致密非蒸发吸气剂及溅射组合的应用

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摘要

HIAF-BRing, a new multi-purpose accelerator facility of the High Intensity Heavy-Ion Accelerator Facility project, requires an extremely high vacuum lower than 10(-9) Pa to fulfill the requirements of radioactive beam physics and high energy density physics. Use of large speed Titanium sublimation pump (TSP) in combination with Sputter ion pumps (SIP) is not always feasible due to space limitations. A novel combination pump, based on Non Evaporable getter (NEG) and a 101/s SIP (NEXTorr (R) D 2000-10) has been evaluated as it provides large speed in a more compact design. The two combination pumps (TSP + SIP and NEXTorr D 2000-10) have been tested by dynamic flow method to measure the ultimate pressure, the pumping speed and the suitability for HIAF. Test results show that both combination pumps can be used in the pressure range of 10(-10) Pa. The ultimate pressure of TSP + SIP combination pump is slightly lower than NEXTorr D 2000-10, but the latter one has much larger sorption capacities (H-2: 210200 Pa l vs 265 Pa. l; CO: 430 Pa.l vs 24 Pa. l), which means it is applicable to a wider pressure range. At the same time, after twenty activation cycles, the initial pumping speed of NEXTorr D 2000-10 for H-2 and CO decreased less than 10% as compared with the initial pumping speed of the first activation, which meets the actual vacuum system requirement of HIAF. A dedicated vacuum chamber with collimator and NEXTorr D 2000-10 has been designed and manufactured to stabilize the dynamic vacuum by decreasing the heavy ion induced gas desorption and increasing the gas pumping speed. The static and dynamic vacuum pressure evolution has been simulated to verify the feasibility of the NEXTorr D 2000-10 used in the HIAF-BRing.
机译:HIAF-LOTS,一种新的多功能加速器设施的高强度重离子加速器设施项目,需要低于10(-9)PA的极高真空,以满足放射性束物理和高能量密度物理的要求。由于空间限制,使用大速度钛升华泵(TSP)与溅射离子泵(SIP)的组合并不总是可行的。已经评估了一种基于非蒸发吸气剂(NEG)和101 / s SIP(​​NEXTORR(NEXTORR(R)D 2000-10)的新型组合泵,因为它在更紧凑的设计中提供了大的速度。通过动态流动方法测试了两个组合泵(TSP + SIP和NextorR D 2000-10)以测量最终压力,泵送速度和HIAF的适用性。测试结果表明,两种组合泵都可以用于10(10)PA的压力范围。TSP + SIP组合泵的最终压力略低于NextorR D 2000-10,但后者的吸附能力大得多(H-2:210200 PA L VS 265 PA。L; CO:430 PA.L VS 24 PA。L),这意味着它适用于更宽的压力范围。同时,在20个激活周期之后,与第一激活的初始泵送速度相比,H-2和CO的初始泵送速度为H-2和Co的初始泵送速度低于10%,这符合实际的真空系统要求HIAF。设计和制造了具有准直的专用真空室和NextorR D 2000-10,通过降低重离子诱导的气体解吸并增加气体泵送速度来稳定动态真空。已经模拟了静态和动态真空压力演化,以验证HIAF带来的旁边的旁边D 2000-10的可行性。

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