NON-EVAPORABLE GETTER POWDER MATERIAL, METHOD FOR PRODUCING NON-EVAPORABLE GETTER POWDER MATERIAL, NON-EVAPORABLE GETTER AND NON-EVAPORABLE GETTER PUMP

摘要

PROBLEM TO BE SOLVED: To provide a non-evaporable getter powder material that saves the time and effort of making the shape or size of powder particles uniform.;SOLUTION: A non-evaporable getter powder material comprises a plurality of powder particles composed of a non-evaporable getter alloy, where the plurality of powder particles are almost spherical and uniform in size.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT