Development of High-resolution Silicon Resonant Atmospheric Pressure Sensor

摘要

There is an increasing need for high-accuracy, high-resolution atmospheric pressure sensors in the fields of the Internet of Things (IoT) and environmental measurement. Concerning the IoT, atmospheric pressure sensors are used as an altimeter or barometer, while for environmental measurement they are used as a barometer to detect extremely small and low-frequency pressure fluctuations, called infrasound, which are caused by earthquakes and tsunamis. Yokogawa has been offering silicon resonant pressure sensors since the 1980s, and its DPharp series differential pressure/pressure transmitters are widely used by many customers. In response to the increasing demand, Yokogawa decided to apply the technologies of silicon resonant sensors to the development of new atmospheric pressure sensors. This paper describes a prototype which achieves a high accuracy of 2.5 Pa and a high resolution of 0.1 Pa, equivalent to the accuracy of existing pressure standards.