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8 MeV electron beam induced modifications in the thermal, structural and electrical properties of nanophase CeO2 for potential electronics applications

机译:8 MeV电子束诱导的纳米CEO2热,结构和电性能的修饰,用于潜在电子应用

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摘要

The effect of 8 MeV electron beam irradiation on the thermal, structural and electrical properties of CeO2 nanoparticles synthesized by chemical precipitation route was investigated. The dose dependent effect of electron irradiation was studied using various characterization techniques such as, thermogravimetric and differential thermal analyses, X-ray diffraction, Fourier transformed infrared spectroscopy and impedance spectroscopy. Systematic investigation based on the results of structural studies confirm that electron beam irradiation induces defects and particle size variation on CeO2 nanoparticles, which in turn results improvements in AC conductivity,, dielectric constant and loss tangent. Structural modifications and high value of dielectric constant for. CeO2 nanoparticles due to electron beam irradiation make it as a promising material for the fabrication of gate dielectric in metal oxide semiconductor devices.
机译:研究了8MeV电子束照射对由化学沉淀路径合成的CeO2纳米颗粒的热,结构和电性能的影响。 使用各种表征技术研究了电子照射的剂量依赖性效果,例如,热重分析和差分热分析,X射线衍射,傅里叶变换的红外光谱和阻抗光谱。 基于结构研究结果的系统调查证实,电子束照射在CEO2纳米粒子上引起缺陷和粒度变化,这反过来导致交流电导率改善,介电常数和损失正切。 介电常数的结构修改和高值。 CEO2由于电子束照射引起的纳米颗粒使其成为用于制造金属氧化物半导体器件中的栅极电介质的有希望的材料。

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