Broadband radio frequency MEMS series contact switch with low insertion loss

摘要

A new radio frequency (RF) micro-electro-mechanical-system (MEMS) single cantilever series contact switch is designed as a low-insertion-loss and low-power electronic component that is intended to provide integrated control of the opening and closing signals of other MEMS devices operating over a wide frequency range (DC-60GHz). The MEMS switching element consists of an A-type top electrode that is fixed onto coplanar waveguide lines through anchor points to reduce the insertion loss in the on-state of the device. The air gap between the top electrode and the actuation electrode of the designed MEMS switch is optimized to improve the isolation characteristics of the switch. In addition, the switching voltage required is approximately 24V. The simulation results presented here show that the insertion loss of the switch in the on-state is less than 0.71dB, while the minimum isolation is 20.69dB in the off-state at 60GHz. The proposed RF MEMS switch will be useful for communication devices and test instruments used in broadband applications.