A MEMS based Fabry-Perot accelerometer with high resolution

摘要

Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry-Perot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry-Perot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.