On self-heating in piezoresistive microcantilevers with short piezoresistor

摘要

This work presents an analytical model for studying the effects of short piezoresistors on self-heating phenomena in piezoresistive microcantilevers. The model is verified using commercial finite element software for predicting the temperature profile in the 4-layer silicon dioxide cantilever with silicon piezoresistor commonly used in biosensors. The numerical analysis involved thermo-electric, thermal and surface-stress studies on the cantilever models. Results show good agreement between analytical and numerical results with average deviation about 3%. Further, the temperatures increase more rapidly with the width than the length of the piezoresistor and narrow piezoresistors are helpful in reducing resistance change due to self-heating