Piezoresistive microcantilever optimization for uncooled infrared detection technology

摘要

Uncooled infrared sensors are significant in a number of scientific and technological applications. A new approach to uncooled infrared detectors has been developed using piezoresistive microcantilevers coated with thermal energy absorbing materials. Infrared radiation absorbed by the microcantilever detector can be sensitively detected as changes in electrical resistance as function of microcantilever bending. The dynamic range of these devices is extremely large due to measurable resistance change obtained with only nanometer level cantilever displacement. Optimization of geometrical properties for selected commercially available cantilevers is presented. We also present results obtained from a modeling analysis of the thermal properties of several different microcantilever detector architectures.