A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology

摘要

This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of magnitude as compared to current CNT-based sensor systems. The range and resolution of the force sensor were determined as 84μN and 5.6nN, respectively. The accuracy of the force sensor was measured to be better than 1% over the devices full range.