A Multi-Axis MEMS Sensor with Integrated Carbon Nanotube-Based Piezoresistors for Precision Force Metrology

摘要

This paper presents the design and fabrication of a multi-axis MEMS force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors capable of measuring forces in the z-axis as well as torques in the θ_x and θ_y axis. Through the use of proper CNT selection and sensor fabrication techniques the performance of the CNT-based sensors was increased by almost three orders of magnitude compared with current CNT-based sensor systems [1]. The range and resolution of the MEMS force sensor were determined to be 84 μN and 5.6 nN, respectively. The accuracy of the force sensor was measured to be better than 1% over the device's full range.