Multi-axis force sensor chip and multi-axis force sensor using same

摘要

A multi-axis sensor chip (1) provided by the invention includes a semiconductor substrate (2) having an action part (4) having an external force action area part (4A) and non-deforming area parts (4B), a support part (3) supporting the action part, and connecting parts (5A, 5B, 5C, 5D) connecting the action part to the support part. The sensor chip also has strain resistance devices Sxa1 to Sxa3, Sya1 to Sya3, Sxb1 to Sxb3, Syb1 to Syb3 provided on deforming parts of the connecting parts and has temperature-compensating resistance devices (11) provided on the non-deforming area parts. Temperature compensation is carried out exactly by means of the temperature-compensating resistance devices when an external force or a load acts on the action part, and highly accurate stress detection can be carried out.