Diamond coatings synthesis by means of chemical vapour deposition using the DC electric arc plasmotron

V.G.Pereverzev; V.G.Ralchenko

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Diamond coatings synthesis by means of chemical vapour deposition using the DC electric arc plasmotron

机译：使用直流电弧等离激元通过化学气相沉积法合成金刚石涂层

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A DC arc jet system for diamond filmdeposition using Ar,H2 and CH5 gases is described.Dependencies of mass growth rate, deposition area, CH4to diamond conversion coefficient on processcondition are presented. Electron microscopy andRaman spectroscopy confirm the possibility to grow ofhigh quality diamond films by this technique.

机译：描述了一种使用Ar，H2和CH5气体进行金刚石膜沉积的直流电弧喷射系统。提出了质量增长率，沉积面积，CH4对金刚石转化系数的依赖关系。电子显微镜和拉曼光谱证实了通过该技术生长高质量金刚石膜的可能性。

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《Физикаи　химия　обработки　материалов》 |1999年第2期|共9页
作者
V.G.Pereverzev; V.G.Ralchenko;
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原文格式 PDF
正文语种 rus
中图分类工程材料学;
关键词
涂层; 金刚石; 直流电弧; 离子发生器; 化学汽相淀积;

机译：涂层;金刚石;直流电弧;离子发生器;化学汽相淀积;

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专利

1. Diamond coatings synthesis by means of chemical vapour deposition using the DC electric arc plasmotron [J] . V.G.Pereverzev, V.G.Ralchenko Физикаи　химия　обработки　материалов . 1999,第2期

机译：使用直流电弧等离激元通过化学气相沉积法合成金刚石涂层
2. A study of diamond synthesis by hot filament chemical vapour deposition on nanocomposite coatings [J] . R. Polini, M. Amar, W. Ahmed, Thin Solid Films . 2005,第1a2期

机译：热丝化学气相沉积在纳米复合涂层上合成金刚石的研究
3. Deposition and characterization of diamond-like nanocomposite coatings grown by plasma enhanced chemical vapour deposition over different substrate materials [J] . AWADESH KR MALLIK, NANADADULAL DANDAPAT, PRAJIT GHOSH Bulletin of Materials Science . 2013,第2期

机译：通过等离子体增强化学气相沉积在不同基材上生长的类金刚石纳米复合涂层的沉积和表征
4. A Study of Diamond Synthesis by Hot Filament Chemical Vapour Deposition on Nanocomposite Coatings [C] . R. Polini, S. Kumashiro, M. J. Jackson, International Surface Engineering Congress . 2006

机译：纳米复合涂料热长丝化学气相沉积的金刚石合成研究
5. Stoichiometric Hydrogenated Amorphous Silicon Carbide Thin Film Synthesis Using DC-Saddle Plasma Enhanced Chemical Vapour Deposition. [D] . Jazizadeh, Behzad. 2013

机译：使用直流等离子体等离子体增强化学气相沉积法合成化学计量的氢化非晶碳化硅薄膜。
6. Synthesis and Mechanical Wear Studies of Ultra Smooth Nanostructured Diamond (USND) Coatings Deposited by Microwave Plasma Chemical Vapor Deposition with He/H2/CH4/N2 Mixtures [O] . S. Chowdhury, J. Borham, S. A. Catledge, -1

机译：He / H2 / CH4 / N2混合物的微波等离子体化学气相沉积法沉积超光滑纳米结构金刚石（USND）涂层的合成及机械磨损研究
7. Diamond-like Carbon Coating Made by RF Plasma Enhanced Chemical Vapour Deposition for Protective Antireflective Coatings on Germanium [O] . Varade Ashish, Krishna Ankit, Reddy K. Niranjan, 2014

机译：RF等离子体增强化学气相沉积法制得的类金刚石碳涂层，用于锗上的保护性抗反射涂层

Diamond coatings synthesis by means of chemical vapour deposition using the DC electric arc plasmotron

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