Deposition and characterization of diamond-like nanocomposite coatings grown by plasma enhanced chemical vapour deposition over different substrate materials

摘要

Diamond-like nanocomposite (DLN) coatings have been deposited over different substrates used for biomedical applications by plasma-enhanced chemical vapour deposition (PECVD). DLN has an interconnecting network of amorphous hydrogenated carbon and quartz-like oxygenated silicon. Raman spectroscopy, Fourier transform-infra red (FT-IR) spectroscopy, transmission electron microscopy (TEM) and X-ray diffraction (XRD) have been used for structural characterization. Typical DLN growth rate is about 1 μm/h, measured by stylus pro-filometer. Due to the presence of quartz-like Si:O in the structure, it is found to have very good adhesive property with all the substrates. The adhesion strength found to be as high as 0-6 N on SS 316 L steel substrates by scratch testing method. The Young's modulus and hardness have found to be 132 GPa and 14-4 GPa, respectively. DLN coatings have wear factor in the order of 1 x 10~(-7) mm~3/N-m. This coating has found to be compatible with all important biomedical substrate materials and has successfully been deposited over Co-Cr alloy based knee implant of complex shape.