Three-Dimensional Atom Probe

摘要

Three-Dimensional Atom Probe (3DAP) is the only materials characterization technology offering capabilities for both three-dimensional image and chemical composition measurement at the atomic scale. It has been applied to many scientific and technological fields, including metallurgy, electronics, semiconductor, optoelectronics, energy, geology, and biomedical researches. The current article provides an introduction to history and principle of atom probe. It is expected to give readers basic understanding in 3D atom probe.