The investigation of carbon nitride films prepared at various arc currents by vacuum cathode arc method

摘要

The carbon nitride films have been prepared in the arc currents range of 20-60 A at the Ar/N-2 atmosphere of 50/400 sccm by the vacuum cathode are deposition method. The properties of the films were characterized by x-ray photoelectron spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy and nanoindentation. The N concentration showed a maximum of 35 at% at 20 A and decreased gradually with the arc currents. The films below 40 A consisted of linear polymeric-like component and sp(2) graphitic cluster. With the increasing of the arc current from 20 to 40 A, the I-D/I-G rose and the photoluminescence (PL) fell gradually, which resulted from the development of the sp(2) graphitic phase and the decrease of the polymeric-like phase. As a result, the CC bonds increased and sp(3)CN and Sp(2)CN decreased. Above 40 A, with the increasing of are currents, I-D/I-G fell and the PL increased gradually, which reflected the decreasing of sp(2) graphitic phase and the modification of C and N atoms in sp(2) cluster. The CC bonds and sp(3)CN fell and the sp(2)CN rose. The nanohardness of films showed increasing tendency with the arc currents. The variation of the relative ratio and the average energy of N-containing species and C-containing species at the atmosphere would be responsible for the change in the properties of films. [References: 25]