An Efficient and Easy Method for Measuring Warpage and Thickness of Large Liquid Crystal Display Glass Substrate Part

摘要

This paper presents an measurement and analysis system of warpage and thickness of LCD glass substrate parts with large and complicated curved surfaces used widely. For such LCD glass substrate part which is characterized by a great volume, a big area, deforming easily, the required accuracy and rigidity of the system are critical features. The purpose of the system is to inspect LCD glass substrate part before the liquid crystal filled process. A new measurement method called continuous automatic tracking controlling of probe scanning measurement system base on Coordinate Measurement Machine (CMM) have been developed, the parts are measured on-line after being machined. The parts are evaluated on-line via the techniques such as curves matching and error separating. The measuring efficiency is advanced and the measurement precision is enhanced. The successful application of it proves that the method is effective, credible and accurate.