SnO_2 and ZnO Co-Doping Effect in In_2O_3(ZnO)_3 Transparent Conducting Ceramics

摘要

The phase evolution and electrical characteristics of In_2O_3(ZnO)_3 were examined when (Zn_(0.5)Sn_(0.5))_(1.5) (Zn:Sn = 1:1 ratio) was substituted for InO_(1.5) in In_2O_3(ZnO)_3. As the amount of (Zn_(0.5)Sn_(0.5))_(1.5) substitution increased up to 8 at%, a single phase of In_2O_3(ZnO)_3 was maintained with a homogeneous grain size distribution, constant electrical characteristics and decreasing lattice constants. When the amount of (Zn_(0.5)Sn_(0.5))_(1.5)is increased over the solubility limit (about 8 at%), the second phases of In_2O_3(ZnO)_4 and Zn_2SnO_4 appeared and the volume fraction of the In_2O_3(ZnO)_3 matrix decreased, while lattice constants remained unchanged. When 16 at% of (Zn_(0.5)Sn_(0.5))_(1.5) was substituted, the In_2O_3(ZnO)_3 phase disappeared and three phases of In_2O_3(ZnO)_4, Zn_2SnO_4 and unreacted In_2O_3 coexisted. Because of the precipitation of the second phases, grain size decreased greatly. Carrier mobility and electrical conductivity were also decreased due to the disappearance of the In_2O_3(ZnO)_3 phase and the decrease of grain size.