Crystallization of Au-Si/Glass Thin Film: A Real-Time Synchrotron X-Ray Scattering Study

摘要

The crystallization of amorphous, Si-rich, Au_(28)Si_(72)/glass thin film was studied in real-time synchrotron X-ray scattering experiments. The amorphous film crystallizes first into Au and Si phases at a low temperature of 206℃. At annealing temperatures above eutectic temperature (T_E = 360℃), the Au phase melts while the Si phase rapidly grows further. The crystallized Au_(28)Si_(72) thin film has nanowire-type grains with 1000-nm-length and 10-nm-diameter. We confirm that the Au liquid phase contributes to the low-temperature crystallization of the Si solid phase for Si-nanowire growth.