INVESTIGATION OF THE DRYING TEMPERATURE DEPENDENCE OF THE ORIENTATION IN SOL-GEL PROCESSED PZT THIN FILMS

摘要

The crystal orientations of lead zirconate titanate (PZT) thin films have been investigated by using various drying temperatures in the sol-gel process. The films were dried at different temperatures between 310 and 350 degrees C for pyrolysis and then were heat treated at 650 degrees C using rapid thermal annealing (RTA). TG/DTA a nd FTIR spectroscopy were used to detect the remnants of organic materials in the thin films prior to the final heat treatment. In order to examine the relationship between the film orientation and the remaining organic materials for the prior and final heat treatment, the films were fabricated with different coating cycles and dried for different holding times and then annealed at 650 degrees C. The preferred orientations were investigated using X-ray diffraction. [References: 9]