Preferred orientation controlling of PZT (52-48) thin films prepared by sol-gel process

摘要

This paper systematically studied the factors including Pb concentration of precursor, PT seeding layer and TiO_2 and ZrO_2 seeding layers, which influence greatly the crystal orientation of lead zirconate titanate (PZT, Zr/Ti = 52/48) thin films fabricated by sol-gel process. We find that the PZT films deposited by precursor with 20% mole excess Pb displayed strong (111) preferred orientation, with 5% mole excess Pb showed a little (100) orientation and pyrochlore phase. PT seeding layer was found prompting the PZT films phase transformation with (110) preferred orientation. In addition, the results show that the TiO_2 and ZrO_2 seeding layers had totally different effects on the preferred orientation of PZT films. The films with TiO_2 seeding layer were highly (111) oriented and exhibited better ferroeletric properties (remnant polarization Pr = 14.2 μC cm~(-2), coercive field E_c = 59.1 kV cm~(-1)) than those of the films with ZrO_2 seeding layer shown (100) orientation (Pr = 7.4 藽cm~(-2), E_c = 42.9 kV cm~(-1)).