METHOD FOR CONTROLLING CRYSTALLINE ORIENTATION PROPERTY OF PZT FERROELECTRIC BODY THIN FILM

摘要

PURPOSE:To preferentially orientate the planes in a specified axial direction, at the time of forming a PZT ferroelectric body thin film by a sol-gel method by coating a substrate with a raw material soln., and thereafter specifying its heat treating temp. CONSTITUTION:The substrate is coated with a raw material soln., and thereafter it is first decomposed at 150 to 950 deg.C, thereafter subjected to a heat treatment at 550 to 800 deg.C and is crystallized. As the substrate, a platinum sheet orientated to the (111) axial direction is preferably used. By regulating the thermal decomposition temp. to 150 to 250 deg.C and 250 to 350 deg.C, a Perovskite type PZT thin film preferentially orientated to respective planes (111), (111) and (100) can be obtd. Furthermore, by regulating the thermal decomposition temp. to 450 to 550 deg.C, a PZT thin film preferentially orientated to the (100) plane can be obtd.