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首页> 外文期刊>Journal of Electronic Materials >Molecular Beam Epitaxial Growth of HgCdTe on CdZnTe(311)B
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Molecular Beam Epitaxial Growth of HgCdTe on CdZnTe(311)B

机译:HdCdTe在CdZnTe(311)B上的分子束外延生长

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摘要

A series of n-type, indium-doped Hg_(1-x)Cd_(x)Te (x~0.225) layers were grown on Cd_(0.96)Zn_(0.04)Te(311)B substrates by molecular beam epitaxy (MBE). The Cd_(0.96)Zn_(0.04)Te(311)B substrates (2 cm×3 cm) were prepared in this laboratory by the horizontal Bridgman method using double-zone-refined 6N source materials. The Hg_(1-x)Cd_(x)Te(311)B epitaxial films were examined by optical microscopy, defect etching, and Hall measurements. Preliminary results indicate that the n-type Hg_(1-x)Cd_(x)Te(311)B and Hg_(1-x)Cd_(x)Te(211)B films (x~0.225) grown by MBE have comparable morphological, structural, and electrical quality, with the best 77 K Hall mobility being 112,000 cm~(2)/V·sec at carrier concentration of 1.9×10~(+15) cm~(-3).
机译:通过分子束外延(MBE)在Cd_(0.96)Zn_(0.04)Te(311)B衬底上生长了一系列n型铟掺杂的Hg_(1-x)Cd_(x)Te(x〜0.225)层)。在该实验室中,使用双区精制6N原料通过水平Bridgman方法制备了Cd_(0.96)Zn_(0.04)Te(311)B衬底(2 cm×3 cm)。通过光学显微镜,缺陷蚀刻和霍尔测量检查了Hg_(1-x)Cd_(x)Te(311)B外延膜。初步结果表明,MBE生长的n型Hg_(1-x)Cd_(x)Te(311)B和Hg_(1-x)Cd_(x)Te(211)B薄膜(x〜0.225)具有可比性。形态,结构和电学性质,在载流子浓度为1.9×10〜(+15)cm〜(-3)时,最佳77 K霍尔迁移率为112,000 cm〜(2)/ V·sec。

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