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Semiconductor saturable absorbers of laser radiation for the wavelength of 808 nm grown by MBE: Choice of growth conditions

机译:MBE生长的808 nm波长的半导体可饱和激光辐射吸收剂:生长条件的选择

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摘要

We investigate selected problems of the molecular beam epitaxy (MBE) technology of fabrication of semiconductor saturable absorbers, which are the main parts of broadband saturable absorber mirrors. These mirrors are designed for mode locking of solid-state lasers emitting in 808 nm band. We analyzed growth conditions during the M BE processes of fabrication of test structures containing the central part of the device with a quantum well (QW). Two main parameters were changed in the processes: the growth temperature of InGaAs/GaAs QW and the arsenic to metals flux ratio. Four types of growth conditions were applied during the test processes. Grown structures were tested by optical methods: photoreflectance and pump-probe spectroscopy (pump-probe measurements and saturation measurements). Obtained results enabled us to establish a correspondence between applied growth conditions and main optical parameters of the absorbers. (C) 2008 Elsevier Ltd. All rights reserved.
机译:我们研究制造半导体可饱和吸收体的分子束外延(MBE)技术的某些问题,这些技术是宽带可饱和吸收体镜的主要部分。这些反射镜设计用于在808 nm波段发射的固态激光器的锁模。我们在测试结构制造的M BE过程中分析了生长条件,该测试结构包含带有量子阱(QW)的器件的中心部分。工艺中改变了两个主要参数:InGaAs / GaAs QW的生长温度和砷与金属的通量比。在测试过程中采用了四种生长条件。生长的结构通过光学方法测试:光反射和泵浦探针光谱法(泵浦探针测量和饱和度测量)。获得的结果使我们能够建立应用的生长条件和吸收剂的主要光学参数之间的对应关系。 (C)2008 Elsevier Ltd.保留所有权利。

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