Research on physico-chemical bases of the ion nitriding process control with the use of plasma spectroscopic diagnostics

摘要

The results of the research which concerns assigning correlation between parameters of the glow discharge plasma, observed by spectroscopic methods, and kinetics of the nitriding process and the nitrided layer structure are presented in the paper. Research on the plasma parameters was carried out for two processes of the ion nitriding enabling creation of two basic structures of the nitrided layer: containing exclusively the diffusion zone α-Fe(N) and containing both, the diffusion zone α-Fe(N) and, the compounds zone ε+γ'. Mass spectra of the gas atmosphere and emission spectra of plasma generated in the near-surface area were recorded at the succeeding stages of processes creating both the above mentioned nitrided layer's structures. On the basis of the obtained results active plasma components, decisive for formation of individual structures of the nitrided layer, were assigned.