Mechanical and tribological properties of diamond-like carbon films deposited by electron cyclotron resonance microwave plasma chemical vapor deposition

摘要

Mechanical and tribological properties of diamond-like carbon (DLC) films deposited by electron cyclotron resonance microwave plasma chemical vapor deposition were analyzed by nanoindentation, nanoscratch and ball-on-disk sliding tests. As the results, hardness and residual stress which depended on the substrate bias voltage had combined effects on the scratch resistance of the films. In sliding friction tests, the transferred layer on the surface of the counterpart accounts for the decrease of friction coefficient with increasing sliding distance. Atomic force microscopic images of the DLC films and the counterpart Si{sub}3N{sub}4 ball surfaces indicate that the sliding friction process could be treated as a periodical scratching process with many indenters.