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首页> 外文期刊>Surface & Coatings Technology >Stress distribution in diamond films grown on cemented WC-Co dental burs using modified hot-filament CVD
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Stress distribution in diamond films grown on cemented WC-Co dental burs using modified hot-filament CVD

机译:使用改进的热丝CVD在硬质WC-Co牙钻上生长的金刚石膜中的应力分布

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A modified hot-filament chemical vapour deposition system has been used to deposit diamond films onto dental burs. The as-grown films were found to be polycrystalline and displayed good coverage. Micro-Raman spectra were taken at different positions of the coating to characterise stress distribution in the deposited film. The Raman diamond peak positions were used to calculate the stress along and across the diamond coating. It was found that the stress across the coating remained constant. However, the stresses along the coating displayed some interesting results. The stress at the base, in the middle and at the tip of the bur was calculated to be - 1.7, - 2.3 and - 3.4 GPa in compression, respectively. The temperature of the bur during deposition was found to be different at different positions on the bur. At the base of the cutting area; at the middle of the bur; and at the tip of the bur the temperature was found to be 842, 908 and 952degreesC, respectively. The stress in the films increased as the temperature of the bur increased. Scanning electron microscopy analysis was used to characterise the as-grown films for morphology and crystallinity. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 19]
机译:改进的热丝化学气相沉积系统已用于将金刚石薄膜沉积到牙钻上。发现生长的薄膜是多晶的,并显示出良好的覆盖率。在涂层的不同位置获取显微拉曼光谱,以表征沉积膜中的应力分布。拉曼金刚石峰值位置用于计算沿着和穿过金刚石涂层的应力。发现整个涂层上的应力保持恒定。但是,沿涂层的应力显示出一些有趣的结果。针的基部,中部和尖端的应力经计算分别为-1.7,-2.3和-3.4 GPa。发现在沉积过程中钻针的温度在钻针上的不同位置处是不同的。在切割区域的底部;在钻针的中间;钻针的温度分别为842、908和952摄氏度。薄膜的应力随着bur温度的升高而增加。使用扫描电子显微镜分析来表征生长的膜的形态和结晶度。 (C)2002 Elsevier Science B.V.保留所有权利。 [参考:19]

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