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Peculiarities of the Capacitance-Voltage Characteristic of a Photoelectric Solar Energy Convertor Based on a Silicon p-n Junction with a Porous Silicon Antireflection Coating

机译:基于具有多孔硅减反射涂层的硅p-n结的光电太阳能转换器的电容-电压特性的特殊性

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摘要

Experimental results on the high-frequency capacitance-voltage characteristic of a photoelectric solar energy converter based on the n~+-p junction with a thin porous silicon film on the frontal surface are considered. It is shown that the capacitance-voltage characteristic is determined by the surface metal-insulator-semiconductor (MIS) structure formed as a result of growing of a porous silicon layer by electrochemical anode etching. The effective thickness of the insulator layer of the MIS structure, the impurity concentration in its semiconductor region, and the density of surface states are determined.
机译:考虑了基于n〜+ -p结的光电太阳能转换器的高频电容-电压特性的实验结果,该n〜+ -p结的正面具有薄的多孔硅膜。结果表明,电容-电压特性由表面金属-绝缘体-半导体(MIS)结构确定,该结构是通过电化学阳极刻蚀生长多孔硅层而形成的。确定MIS结构的绝缘体层的有效厚度,其半导体区域中的杂质浓度以及表面状态的密度。

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