A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions

摘要

A hybrid plasma model is utilized for the simulation of inductively coupled plasmas (ICPs). It consists of a plasma fluid model coupling fluid with Maxwell's equations and a Monte Carlo (MC) particle tracing model utilized for the calculation of the ion mobility in high electrostatic fields (sheaths). The model is applied to low pressure Argon plasma in the gaseous electronics conference (GEC) reference cell. Following measurements of electron energy distribution function (EEDF) in low pressure ICPs, a three-temperature EEDF is considered; it is formulated with a generalized equation and depends on the local plasma potential. The use of a predefined formula for the EEDF entails a low computational cost: All parameters affected by the EEDF are calculated as functions of the plasma potential and the mean electron energy once and before the solution of the model. The model results are validated by a comparison with spatially resolved (on axial and radial distance) measurements of electron density, electron temperature, and plasma potential. Both the calculation of the ion mobility by the MC model and the consideration of the three-temperature EEDF are critical for the accuracy of the model results. The very good agreement of the model results with the measurements and the low computational cost in combination with the flexibility of the code utilized for the numerical solution manifest the potential of the hybrid plasma model for the simulation of low pressure ICPs.