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Highly oriented metallic SmS films on Si(100) grown by pulsed laser deposition

机译:通过脉冲激光沉积在Si(100)上生长的高取向金属SmS膜

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摘要

Stoichiometric and highly oriented in (100) direction SmS films in the metallic phase have been grown on Si(100) substrate at room temperature by pulsed laser deposition (PLD) as revealed from lattice parameter, reflectivity and electrical resistivity measurements. Above-critical compressive stress P=0.9 GPa in as grown film was determined from sample curvature measurements and attributed to stress building up in PLD process further accompanied by stress due to SmS versus Si lattice parameter mismatch. Stress relaxation and subsequent metal-to-semiconductor phase transition occurred following annealing at T= 900 K as evident from consistent changes of SmS/Si sample curvature, structural, optical and electrical properties.
机译:从晶格参数,反射率和电阻率测量结果可以看出,在室温下,通过脉冲激光沉积(PLD)在Si(100)衬底上生长了化学计量的且在(100)方向上高度取向的SmS膜在金属相中。通过样品曲率测量确定了生长薄膜中的高于临界压缩应力P = 0.9 GPa,这归因于PLD工艺中的应力累积,进一步伴随着SmS与Si晶格参数失配引起的应力。从SmS / Si样品曲率,结构,光学和电学性质的一致变化中可以看出,在T = 900 K退火之后,出现了应力松弛和随后的金属-半导体相变。

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  • 来源
    《Thin Solid Films》 |2011年第19期|p.6323-6325|共3页
  • 作者单位

    National Research Nuclear University "Moscow Engineering Physics Institute," Moscow 115409, Russia ,Russian Research Center "Kurchatov Institute," NBIC Center, Moscow 123182, Russia;

    Russian Research Center "Kurchatov Institute," NBIC Center, Moscow 123182, Russia;

    Russian Research Center "Kurchatov Institute," NBIC Center, Moscow 123182, Russia;

    National Research Nuclear University "Moscow Engineering Physics Institute," Moscow 115409, Russia;

    National Research Nuclear University "Moscow Engineering Physics Institute," Moscow 115409, Russia ,Russian Research Center "Kurchatov Institute," NBIC Center, Moscow 123182, Russia;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    samarium sulfide; thin films; metal/dielectric phase transition; pulsed laser deposition; si(100);

    机译:硫化mar;薄膜;金属/介电相变;脉冲激光沉积;si(100);

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